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NDIR sulphur hexafluoride detector

NDIR sulphur hexafluoride detector

Sulphur Hexafluoride is used as a plasma in the semiconductor/wafer fab industry, for use as an etchant. The SF 6 will break down in the plasma to form sulphur and fluorine. The fluorine plasma is the main component that performs the etching process. ... The detector uses ground-breaking NDIR …NDIR Sensor for Non-Dispersive Infrared Detection

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