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3/1/2018Above this O2 pressure, the etch rate with CF4 exceeded that with Ar alone. For comparison the random arrival rate of O2 was approximately equal to the ion arrival rate at a partial pressure of about .00002 Torr. There were also ion source and ion pressure gauge maintenance problems as a result of the use of CF4…Phrack #65

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Protect your workers and the environment from SF6 leaks with the maintenance free Area Check P2. Using negative ion capture technology the Area Check P2 detects SF6 down to low levels without cross sensitivity to other gases or moisture. Field replaceable smart sensors last 12 months and can be outfitted with an optional O2 …SF6 LEAK DETECTOR 3-033-R002 | HNL Systems - Gas det…

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Control Light Room With Arduino and PIR Motion Sensor: Today, we will see together how you can create an Arduino PIR motion sensor for your room in order to turn ON/OFF the light by detecting human movements.PIR sensor: The PIR sensor stands for Passive Infrared sensor. It is a low cost sensor …Zone sensors - Trane

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To further demonstrate the utility of FT-IR for process optimization and investigation into alternative etch gases, a series of wet clean recoveries were performed using NF3 as the plasma clean gas instead of SF6…Fluke FLK-Ti450 SF6 60HZ Gas Detector Thermal Imager ...

SF 6 Network Monitor Central monitoring and indication of measuring values. 3-026-R114. The SF 6 Network Monitor is the central control unit from up to five SF 6 Air Sensors to be connected. Warning and alarm thresholds can be set for each SF 6 Air …For monitoring the air of SF indoor plant in permanent ...

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