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7/31/2002Four of them, CF4/O2/He, SF6/O2/He, and CHF3/O2/He were chosen for high etch rate, sidewall slope, and surface morphology. Each added gases had a unique property on the etch rate, anisotropy, surface roughness and sidewall morphology. Result indicates that vertical slope and smooth surface are obtained using the SF6/O2…Blog | Nova Gas

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